Semiconductor
Common motion platforms for high throughput, precision, safety and future growth.
The most successful semiconductor equipment manufacturers have realized that partnering with Danaher Motion can directly impact the success of their machines in the marketplace. As a result, these OEMs have shortened tool development cycles, increased personnel efficiency, and produced higher performance systems that result in higher wafer yields.
Products for Semiconductor Applications
SynqNet® controls
All-digital motion network solutions fulfill demands for increased performance, diagnostic capabilities, safety and reduced time to market. Learn more >
Dover Staging
The world's leading manufacturer and designer of precision air-bearing systems, stages and linear actuators. Learn more >
S200 Brushless Servo Drives & AKM Servomotors
For high performance servos in low power applications. Learn more >
Direct Drive Motors
DDR motors are available with pre-configured controllers, drives and feedback devices that provide a complete “one stop shopping” solution for your application. Learn more >
Thomson Actuators
Mechanical and electro-mechanical products offering flexibility, precision, efficiency, and reliability. Learn more >
Case Study: Asyst® Technologies
The goal of the Asyst Spartan™ EFEM (Equipment Front End Module) project was to produce the most robust and flexible tool of its kind with a dual role as a general purpose wafer sorter as well.
Key Customer Requirements:
Asyst engineers developed the Spartan EFEM to set new standards in the marketplace. Very compact machine size - The result is an EFEM that is one-half the volume of other tools of its kind. Custom drive development for new internal robot design - a high throughput dual end-effector Cartesian robot with edge grip aligners. Spartan EFEM design had to accommodate an ISO class 1 and better microenvironment option - this would impact product selection.
Remote machine diagnostics / Advanced tuning tools
Sophisticated trajectory planning / motion programming tools
Motion software/controller must be TCP/IP enabled for remote operation outside of clean room
Digital Network for reduced wiring / design flexibility
Solution Set
XMP-SynqNet controls using MPI (C/C++ libraries)
BodeTool / MotionConsole
Motion Scope MPX ActiveX programming for production testing
Custom Kollmorgen Servotronix SynqNet drives
Asyst is a registered trademark of Asyst Technologies, Inc.. Spartan is a trademark of Asyst Technologies, Inc. All Rights Reserved.
Software capabilities
The Danaher Motion software feature set continuously grows for SynqNet control technology. The advanced feature set includes:
Path Motion. To move an axis along a path in ndimensionalspace, XMP & ZMP SynqNet controllers support a variety of path motion algorithms including PVT, PT, spline, frame moves, and custom. Specific splines supported include Bezel and B-spline. You choose the algorithm that provides the optimal path type, level of control, and overall requirements for the application.
Collision avoidance. To protect against collisions between axes that share the same workspace, SynqNet controllers can continuously monitor the relative distance between the axes. If the distance falls below the defined distance tolerance, the controller generates an error event to stop the axes. Implemented in hardware,. this feature avoids the delays associated with host-based monitoring.
On-the-fly trajectory modification. You can change motion trajectory at any time and as often as needed by updating acceleration, velocity, and/or position. The motion controller’s on-board motion processor automatically recalculates the trajectory in real time.
2D compensation tables. The mechanical tolerances in the assembly of an air-bearing stage’s surface can create small errors between the measured and true position of the stage plate. To compensate for these errors, the MPI supports 2D compensations tables that yield higher accuracy in submicron positioning systems.
Gantry algorithms. Danaher Motion has implemented precise gantry drive algorithms to compensate for cross-axis coupling in systems where two motors control a single linear (Y) axis. For systems that also incorporate a transverse (X) axis, yaw control is supported as well. Gantry functions adjust the drive demands, reducing the rotational skew positioning error to 1-3 nanometers.
Gain scheduling. For optimal, high-speed motion with fast, accurate settling, you can program the controller to change gain according to position. This done by creating a table that specifies a gain for each segment of a move (acceleration, slew, and deceleration) instead of a single gain for the entire move.
Divide-by-n. To trigger an external device based on an axis’ actual position—for example to drive a camera shutter or pulsed laser—SynqNet controllers are available with a divide-by-n rate generator. With divide-by-n, the controller generates a pulsed after the “nth” (user-specified) encoder transition. Divide-by-n is entirely implemented in hardware.
